NANO PRO™ 4 Inch Lithium Tantalate Thin Film on Insulator Wafers (LTOI) X-cut
NANOSSR offers Premium 4 inch Lithium Tantalate (LiTaO3) Thin Film on Insulator (LTOI). It typically consists of a thin layer of LiTaO3 on an insulating substrate. The insulator layer between the LTOI thin film and silicon wafer helps to prevent the chance of occurring short circuits and enhancing the material's electrical performance. The LTOI wafer has piezoelectric properties, which makes it an ideal for the conversion of mechanical energy into electrical energy. It is widely used in making surface acoustic wave (SAW) filters, sensors, actuators, and resonators.
Specification:
| General Wafer | |
| Structure | LiTaO3 / Oxide / Si |
| Diameter | Φ100 ± 0.2 mm |
| Thickness | 525 ± 20 μm |
| Primary Flat Length | 32.5 ± 2 mm |
| Wafer Beveling | R Type |
| TTV | μm |
| LTV | 2) / 95% |
| Bow | ± 50 μm |
| Warp | μm |
| Edge Exclusion | 5 mm |
| Edge Trimming | 2 ± 0.5 mm |
| Lithium Tantalate Layer | |
| Average Thickness | 600 ± 20 nm |
| Orientation | X axis ± 0.3° |
| Primary Flat | Perpendicular to +Z Axis ± 1° |
| Front Surface Roughness (Ra) | |
| Defects |
Within 150 total |
| Isolation SiO2 Layer | |
| Thickness | 4700 ± 100 nm |
| Uniformity | |
| Substrate | |
| Material | Si |
| Resistivity | > 10 kΩ·cm |
| Orientation | ± 1° |
| Primary Flat Orientation | ± 1° |
| Backside | Etched |
Please contact us for bulk order or customized shape, size, thickness and substrate.
References:
